JPH0176028U - - Google Patents
Info
- Publication number
- JPH0176028U JPH0176028U JP1987171476U JP17147687U JPH0176028U JP H0176028 U JPH0176028 U JP H0176028U JP 1987171476 U JP1987171476 U JP 1987171476U JP 17147687 U JP17147687 U JP 17147687U JP H0176028 U JPH0176028 U JP H0176028U
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- generation chamber
- extraction window
- window
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005284 excitation Effects 0.000 claims description 2
- 238000000605 extraction Methods 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171476U JPH0176028U (en]) | 1987-11-10 | 1987-11-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987171476U JPH0176028U (en]) | 1987-11-10 | 1987-11-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0176028U true JPH0176028U (en]) | 1989-05-23 |
Family
ID=31463343
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987171476U Pending JPH0176028U (en]) | 1987-11-10 | 1987-11-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0176028U (en]) |
-
1987
- 1987-11-10 JP JP1987171476U patent/JPH0176028U/ja active Pending
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